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Start Up
On the right screen, click on the following icon in order to launch the program for EDS analysis.
You must start up SEM application before starting EDS application. Don’t forget to switch
off the infrared camera.
Once you have launched the analysis station, Bias is applied to the EDS detector, the following
programs start and the respective icons appear on the task bar.
SEM monitor
ssm dead time
Analyzer Manager Analyser manager
SSM bias
SSM dead time
SSM probe tracking
SEM monitor
ssm probe tracking ssm bias
The basic windows of analysis open after the double click on Analysis station.
Define acquisition conditions
SEM condition: Accelerating voltage: 15kV, current: 20 µA, probe current 8 or 9, WD = 8mm
SSM rate meter:
SSM counting rate : 2000-7000 cps
Dead time 20 – 40 %
Tip: if dead time and/or counts are too low, increase PC gradually.
Press on Cond in the basic windows in order to define the acquisition conditions.
SPECTRUM ACQUISITION
Acquisition conditions must be defined as followed:
Pha mode : T3 (high resolution)
Preset : live time
Preset value : 100-300 secs
Tip : the number of counts for the time of acquisition must be round 200000. The more
counts you have, the better the precision of the quantitative analysis will be.
X-ray mapping
o Pha mode : T3 (high resolution)
o 512*384
o Preset number of scan
o Dwell time : 0.1msec
Image
o Resolution : 1024x768
o Preset : 1 Frame
Acquire image for analysis
Before image acquisition via Analysis program, check and adjust focus and astigmatism in LM or SEM
mode.
Once image has been acquired, Acquire a spectrum.
Image and file disposition
Samples and images-spectrum and mappings of samples can be arranged as in windows explorer.
Acquire a spectrum
Acquisition conditions have already been defined; simply press on the Spc icon
A new window with the spectrum acquisition of the defined area (area of the picture) will open.
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